Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

by Marc J. Madou

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive...

• Format: Hardcover
• Language: English
• ISBN: 0849331803
• ISBN13: 9780849331800
• Release Date: August 2011
• Publisher: CRC Press
• Length: 1992 Pages
• Weight: 13.75 lbs.
• Dimensions: 3.3" x 9.9" x 11.2"