Fundamental Aspects of Silicon Oxidation

by Yves J Chabal

This book deals with an important basic technology in microelectronics. It discusses silicon oxidation in a tutorial fashion from both experimental and theoretical viewpoints. The authors report on the state of the art both at Lucent Technology and in academic research. The book will appeal to researchers and advanced students.

• Format: Paperback
• Language: English
• ISBN: 3642625835
• ISBN13: 9783642625831
• Release Date: October 2012
• Publisher: Springer
• Length: 262 Pages
• Weight: 0.87 lbs.
• Dimensions: 0.6" x 6.1" x 9.2"