Foundations of MEMS

by Chang Liu

Book Overview

Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. KEY TOPICS: Liu discusses designs, materials, and fabrication issues... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 0131472860
• ISBN13: 9780131472860
• Release Date: January 2005
• Publisher: Prentice Hall
• Length: 530 Pages
• Weight: 2.40 lbs.
• Dimensions: 1.1" x 7.5" x 9.3"