Field Guide to Optical Lithography

by Chris A. Mack

This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. It details the... This description may be from another edition of this product.

• Format: Spiral-bound
• Language: English
• ISBN: 0819462071
• ISBN13: 9780819462077
• Release Date: January 2006
• Publisher: SPIE-International Society for Optical Engine
• Length: 122 Pages
• Weight: 0.15 lbs.