Fabrication Engineering at the Micro- and Nanoscale, 3rd edition

by Stephen A. Campbell

Book Overview

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples,...

• Format: Paperback
• Language: English
• ISBN: 0195320174
• ISBN13: 9780195320176
• Release Date: September 2007
• Publisher: Oxford University Press
• Length: 672 Pages
• Weight: 2.35 lbs.
• Dimensions: 1.3" x 7.5" x 9.3"