Evolution of Thin Film Morphology: Modeling and Simulations

by Toh-Ming Lu and Matthew Pelliccione

Thin?lmdepositionisthemostubiquitousandcriticaloftheprocessesusedto manufacture high-tech devices such as microprocessors, memories, solar cells, microelectromechanicalsystems(MEMS), lasers, solid-statelighting, andp- tovoltaics. The morphology and microstructure of thin ?lms directly controls their optical, magnetic, and electrical properties, which are often signi?cantly di?erent from bulk material properties. Precise control of morphology and microstructure...

• Format: Hardcover
• Language: English
• ISBN: 0387751084
• ISBN13: 9780387751085
• Release Date: November 2007
• Publisher: Springer
• Length: 206 Pages
• Weight: 1.07 lbs.
• Dimensions: 0.6" x 6.1" x 9.2"