CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications

by D. Lange, O. Brand, H. Baltes

This book is intended for scientists and engineers in the field of micro- and nano- electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination...

• Format: Paperback
• Language: English
• ISBN: 3642077285
• ISBN13: 9783642077289
• Release Date: December 2010
• Publisher: Springer
• Length: 142 Pages
• Weight: 0.49 lbs.
• Dimensions: 0.3" x 6.1" x 9.2"