Chemical Vapor Deposition of Tungsten and Tungsten Silicides for Vlsi/ ULSI Applications

by John E. J. Schmitz

This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0815512880
• ISBN13: 9780815512882
• Release Date: January 1993
• Publisher: William Andrew
• Length: 251 Pages
• Weight: 1.50 lbs.
• Dimensions: 0.7" x 6.2" x 9.3"