CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms

by Flora Li and Arokia Nathan

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although...

• Format: Hardcover
• Language: English
• ISBN: 354022680X
• ISBN13: 9783540226802
• Release Date: March 2005
• Publisher: Springer
• Length: 232 Pages
• Weight: 1.19 lbs.
• Dimensions: 0.6" x 6.2" x 9.0"