CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications

by H. Baltes, D. Lange, O. Brand

Book Overview

This book is intended for scientists and engineers in the field of micro- and nano- electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 3540431438
• ISBN13: 9783540431435
• Release Date: July 2002
• Publisher: Springer
• Length: 142 Pages
• Weight: 0.75 lbs.
• Dimensions: 0.5" x 6.3" x 9.5"