Bulk Lithography: Synthesis and Analysis

By Kiran Bhole

Bulk Lithography is micro-fabrication process for the development of three-dimensional polymer micro-structures using single scan of layer beam over unconstraint depth of photopolymer. Development of the free formed three-dimensional micro-structures without stair-stepping effect along the direction of propagation of light is the main feature of the process. Bulk Lithography has demonstrated capability to fabricate both Cartesian and Axi-symmetric micro-structures. Furthermore process also has demonstrated the fabrication of application oriented micro-structures such as micro-cantilever, micro-lens, fresnel lens and so on.

• Format: Paperback
• Language: English
• ISBN: 3659394475
• ISBN13: 9783659394478
• Release Date: February 2015
• Publisher: LAP Lambert Academic Publishing
• Length: 100 Pages
• Weight: 0.35 lbs.
• Dimensions: 0.2" x 6.0" x 9.0"