The demand on NiTi thin film equipment is gradually increasing in a wide range in all the fieldssuch as biomedical, automotive, and aeronautic. NiTi SMA has now moved from the bulk form to the microscale and nano-scales.NiTi thin films embedded with its two peculiar characters that are shape memory property andpseudoelasticitywhich can give raise a huge power-to-weightratio in MEMS, results theamazing methods for activation. The present investigation...