Amorphous Silicon Carbide for MEMS Applications

by Arnab Choudhury

This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3639305272
• ISBN13: 9783639305272
• Release Date: December 2010
• Publisher: VDM Verlag
• Length: 180 Pages
• Weight: 0.60 lbs.
• Dimensions: 0.4" x 6.0" x 9.0"