Gas Analysis

by Carol Meyer, Mark Raynor, William Geiger

Book Overview

Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry,...

• Format: Hardcover
• Language: English
• ISBN: 1118065662
• ISBN13: 9781118065662
• Release Date: July 2013
• Publisher: Wiley
• Length: 386 Pages
• Weight: 1.55 lbs.
• Dimensions: 1.1" x 6.1" x 9.3"