Advanced Mechatronics and Mems Devices

by Dan Zhang

Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional...

• Format: Paperback
• Language: English
• ISBN: 1489997458
• ISBN13: 9781489997456
• Release Date: October 2014
• Publisher: Springer
• Length: 252 Pages
• Weight: 0.82 lbs.
• Dimensions: 0.6" x 6.1" x 9.2"